Nanofabrication/Equipment
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Contents
1
Lithographic Tools
2
Plasma and Reactive Ion Etching
3
Wet Processing
4
Deposition
5
Nanocarbon Synthesis Facilities
6
Metrology
7
Misc Tools
8
Electrical Test and Characterization
Lithographic Tools
UV Mask Aligner (front side and front to back)
Laser Writer
MLA
Interferometric Lithography System
100KV Electron Beam Lithography System (JEOL 9100 FS)
Raith 30KV Electron Beam Lithography System
Focused Ion Beam System
Plasma and Reactive Ion Etching
Oxford ICP and RIE etching system (2 chambers - 1 loadlock)
March RIE etchers
Wet Processing
WAFER PRIMING OVEN
LAMINAR FLOW PROCESS STATIONS
Deposition
Small Coater
AJA Oxide Sputter System
AJA Sputter System (metals)
FC2000 Ferrotec Ebeam Evaporator(metals)
ICP - CVD Deposition System
Nanocarbon Synthesis Facilities
Lamda Microwave Plasma CVD system (nanocrystalline diamond deposition)
Thermal/PECVD System for Synthesis of CNT and Graphene
Seeding Station for UNCD Deposition
Metrology
SPECTROSCOPIC ELLIPSOMETER
SCANNING PROBE MICROSCOPE
SURFACE PROFILOMETERS
OPTICAL MICROSCOPE
RESISTIVITY MEASUREMENT SYSTEM
SCANNING VIBRATING ELECTRODE SYSTEM
VOLTAMMETRY SYSTEM
Misc Tools
ADT 7200 Dicing Saw
Critical Point Dryer
Electrical Test and Characterization
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