Nanofabrication/Equipment/MPCVD

Features

Diamo Tek 1800 is a 915 MHz microwave plasma CVD system from Lambda Technologies Inc.(www.microcure.com) for synthesis of diamond thin films over large area(up to 200 mm diameter. The system is fully automated and custom built to operate in the clean room environment. The unique patented design of the tunable resonant cavity microwave reactor allows unprecedented thickness uniformity of diamond thin films on a Silicon wafers ranging from 4" to 8" diameter. [edit] Features

• Microwave frequency: 915 MHz, Power: 1kW-10kW
• Substrate heater range: 50-750 C
• Substrate size: 4"-8" diameter wafer
• Ability to synthesize Nitrogen doped diamond thin films
• In-situ Optical emission spectroscopy to monitor gas species in real-time

The instrument is located in the CNM clean room C129.

User Proposal Feasibility

When requesting the use of this instrument, please provide the following information in your user proposal:

• Sample materials, shapes, and sizes
• Deposition temperature
• Type of diamond films: For example, Microcrystalline, Nanocrystalline or Ultrananocrystalline etc.
• Undoped or Nitrogen doped
• Number of depositions including film thickness