Nanofabrication/Equipment/ PVD

FC2000 Electron Beam Evaporator

The instrument is located in the clean room, room C118

Features

Metals Sources always available: Ti, Cr, Au, Pt, Al - direct in pocket; Optional : Silver, Pd (in crucible)

When requesting the use of this instrument, please provide the following information in your user proposal:

• Sample materials, shapes, and sizes
• Temperature compatibility of samples.
• Number of samples to process or number of times of instrument usage

Questions? Please contact the instrument custodian before submitting your proposal.