Nanofabrication/Equipment/ PVD

From CNM Wiki

< Nanofabrication‎ | Equipment

Jump to navigation Jump to search

FC2000 Electron Beam Evaporator

The instrument is located in the clean room, room C118

Features

Metals Sources always available: Ti, Cr, Au, Pt, Al - direct in pocket; Optional : Silver, Pd (in crucible)

When requesting the use of this instrument, please provide the following information in your user proposal:

Sample materials, shapes, and sizes
Temperature compatibility of samples.
Number of samples to process or number of times of instrument usage

Questions? Please contact the instrument custodian before submitting your proposal.

Retrieved from "https://wiki.anl.gov/wiki_cnm/index.php?title=Nanofabrication/Equipment/_PVD&oldid=6655"