Nanofabrication/Equipment

Lithographic Tools

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UV Mask Aligner (front side and front to back)

Laser Writer

MLA

Interferometric Lithography System

100KV Electron Beam Lithography System (JEOL 9100 FS)

Raith 30KV Electron Beam Lithography System

Focused Ion Beam System

Plasma and Reactive Ion Etching

Oxford ICP etching system (2 chambers - 1 loadlock)

Oxford 6 Inch ICP

March RIE etchers

Wet Processing

WAFER PRIMING OVEN

LAMINAR FLOW PROCESS STATIONS

Deposition

Small Coater

AJA Oxide Sputter System

AJA Sputter System (metals)

FC2000 Ferrotec Ebeam Evaporator(metals)

ICP - CVD Deposition System

Nanocarbon Synthesis Facilities

Lamda Microwave Plasma CVD system (nanocrystalline diamond deposition)

Thermal/PECVD System for Synthesis of CNT and Graphene

Seeding Station for UNCD Deposition

Metrology

SPECTROSCOPIC ELLIPSOMETER

SCANNING PROBE MICROSCOPE

SURFACE PROFILOMETERS

Filmetrics F40-UV

OPTICAL MICROSCOPE

RESISTIVITY MEASUREMENT SYSTEM

SCANNING VIBRATING ELECTRODE SYSTEM

VOLTAMMETRY SYSTEM

Misc Tools

ADT 7200 Dicing Saw

Critical Point Dryer