Nanofabrication/Equipment/Interferometric
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The instrument is located in the clean room, room C118
Interferometric Lithography system
Features
The instrument is located in the CNM clean room.
User Proposal Feasibility
When requesting the use of this instrument, please provide the following information in your user proposal:
- Sample materials, shapes, and sizes
- Information about the intended patterns (shapes, sizes, distances, area coverage)
- Important pattern quality requirements (if any)
- Number of samples to process or number of times of instrument usage
Questions? Please contact the instrument custodian before submitting your proposal.