Nanofabrication/Equipment: Difference between revisions
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(Created page with "== Lithographic Tools == ; UV Mask Aligner (front side and front to back) ; Laser Writer ;Na...") |
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;[[Nanofabrication/Equipment/ PVD | AJA Sputter System (metals)]] | ;[[Nanofabrication/Equipment/ PVD | AJA Sputter System (metals)]] | ||
;[[Nanofabrication/Equipment/ PVD | FC2000 Ferrotec Ebeam Evaporator(metals)]] | |||
;[[Nanofabrication/Equipment/ICP-CVD Deposition System | ICP - CVD Deposition System]] | ;[[Nanofabrication/Equipment/ICP-CVD Deposition System | ICP - CVD Deposition System]] | ||
Revision as of 19:41, November 20, 2020
Lithographic Tools
Plasma and Reactive Ion Etching
Wet Processing
Deposition
Nanocarbon Synthesis Facilities
Metrology
Misc Tools