Nanofabrication/Equipment: Difference between revisions

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;[[Nanofabrication/Equipment/Oxford ICP Etching System | Oxford 6 Inch ICP]]
;[[Nanofabrication/Equipment/Oxford ICP Etching System | Oxford 6 Inch ICP]]


;[[Nanofabrication/Equipment/REACTIVE ION ETCHERS | March RIE etchers]]
;[[Nanofabrication/Equipment/Reactive Ion Etching| March RIE etchers]]


== Wet Processing ==
== Wet Processing ==

Revision as of 17:27, November 25, 2020

Lithographic Tools

  • LaserWriter.jpg
UV Mask Aligner (front side and front to back)
Laser Writer
MLA
Interferometric Lithography System
100KV Electron Beam Lithography System (JEOL 9100 FS)
Raith 30KV Electron Beam Lithography System
Focused Ion Beam System

Plasma and Reactive Ion Etching

Oxford ICP etching system (2 chambers - 1 loadlock)
Oxford 6 Inch ICP
March RIE etchers

Wet Processing

WAFER PRIMING OVEN
LAMINAR FLOW PROCESS STATIONS

Deposition

Small Coater
AJA Oxide Sputter System
AJA Sputter System (metals)
FC2000 Ferrotec Ebeam Evaporator(metals)
ICP - CVD Deposition System

Nanocarbon Synthesis Facilities

Lamda Microwave Plasma CVD system (nanocrystalline diamond deposition)
Thermal/PECVD System for Synthesis of CNT and Graphene
Seeding Station for UNCD Deposition

Metrology

SPECTROSCOPIC ELLIPSOMETER
SCANNING PROBE MICROSCOPE
SURFACE PROFILOMETERS
OPTICAL MICROSCOPE
RESISTIVITY MEASUREMENT SYSTEM
SCANNING VIBRATING ELECTRODE SYSTEM
VOLTAMMETRY SYSTEM

Misc Tools

ADT 7200 Dicing Saw
Critical Point Dryer


Electrical Test and Characterization

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