Nanofabrication/Equipment/Interferometric

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Interferometric Lithography system

The instrument is located in the clean room, room C118


Features

The instrument is located in the CNM clean room.


User Proposal Feasibility

When requesting the use of this instrument, please provide the following information in your user proposal:

  • Sample materials, shapes, and sizes
  • Information about the intended patterns (shapes, sizes, distances, area coverage)
  • Important pattern quality requirements (if any)
  • Number of samples to process or number of times of instrument usage

Questions? Please contact the instrument custodian before submitting your proposal.

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