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[[File:Lamda1.JPG|right|400px| The instrument is located in the clean room, room C118]]
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[[File:Lamda2.JPG|right|400px| The instrument is located in the clean room, room C118]]
==Features==
==Features==
Latest revision as of 19:53, November 23, 2020
Features
Diamo Tek 1800 is a 915 MHz microwave plasma CVD system from Lambda Technologies Inc.(www.microcure.com) for synthesis of diamond thin films over large area(up to 200 mm diameter. The
system is fully automated and custom built to operate in the clean room environment. The unique patented design of the tunable resonant cavity microwave reactor allows unprecedented
thickness uniformity of diamond thin films on a Silicon wafers ranging from 4" to 8" diameter.
[edit] Features
Microwave frequency: 915 MHz, Power: 1kW-10kW
Substrate heater range: 50-750 C
Substrate size: 4"-8" diameter wafer
Ability to synthesize Nitrogen doped diamond thin films
In-situ Optical emission spectroscopy to monitor gas species in real-time
The instrument is located in the CNM clean room C129.
User Proposal Feasibility
When requesting the use of this instrument, please provide the following information in your user proposal:
Sample materials, shapes, and sizes
Deposition temperature
Type of diamond films: For example, Microcrystalline, Nanocrystalline or Ultrananocrystalline etc.
