Nanofabrication/Equipment/AJA Oxide Sputter System

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AJA Oxide Sputtering System

The instrument is located in the clean room,


Features

The AJA oxide sputtering tool is a magnetron sputtering tool. The tool has 3” diameter targets, heating capabilities up to 800 °C across a 200 mm wafer, RF and DC sources, an automated load lock system, and computer automated control. This tool provides fast deposition rates for oxides (3 off-axis RF sputtering guns) because of the large target sizes and provides high fidelity oxide depositions because of the off-axis gun alignment. The tool has 2 on-axis DC sputtering guns for the deposition of metallic electrodes and adhesion layers.


User Proposal Feasibility

When requesting the use of this instrument, please provide the following information in your user proposal:

  • Sample materials, shapes, and sizes
  • Temperature compatibility of samples.
  • Number of samples to process or number of times of instrument usage

Questions? Please contact the instrument custodian before submitting your proposal.

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