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==FEI Nova 600 NanoLab==
==FEI Nova 600 NanoLab==
[[Image:FEI Nova FIB.jpg|right|400px| The instrument is located in the clean room, room C116]]
[[Image:IMG 0983.JPG|right|400px| The instrument is located in the clean room, room C116]]
The FEI Nova 600 NanoLab is a dual-beam instrument that integrates ion and electron beams for focused-ion-beam (FIB) and scanning electron microscope (SEM) functionality in one machine. Users can switch between the two beams for quick and accurate navigation and processing. Convergence of the SEM and FIB at short working distance allows precision milling, etching and deposition at high resolution.
The FEI Nova 600 NanoLab is a dual-beam instrument that integrates ion and electron beams for focused-ion-beam (FIB) and scanning electron microscope (SEM) functionality in one machine. Users can switch between the two beams for quick and accurate navigation and processing. Convergence of the SEM and FIB at short working distance allows precision milling, etching and deposition at high resolution.
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* 30 kV Sirion electron column, 500 V to 30 kV
* 30 kV Sirion electron column, 500 V to 30 kV
* Secondary electron, limited backscattered electron, and secondary ion imaging
* Secondary electron, limited backscattered electron, and secondary ion imaging
* Gas injection systems: platinum, tungsten, TEOS, XeF2
* Gas injection systems: platinum, tungsten, TEOS, carbon
* Micromanipulator from Omniprobe: Autoprobe 200
* Micromanipulator from Omniprobe: Autoprobe 200
* Raith Elphy lithography system set up for ion-beam lithography
* Raith Elphy lithography system set up for ion-beam lithography
* General FIB info [http://www.fei.com/uploadedFiles/Documents/Content/2006_06_FIBCapabilities_td.pdf 685kb pdf]
Note: The above links take you to an external web site.
==User Proposal Feasibility==
==User Proposal Feasibility==
Latest revision as of 19:30, November 24, 2020
FEI Nova 600 NanoLab
The instrument is located in the clean room, room C116
The FEI Nova 600 NanoLab is a dual-beam instrument that integrates ion and electron beams for focused-ion-beam (FIB) and scanning electron microscope (SEM) functionality in one machine. Users can switch between the two beams for quick and accurate navigation and processing. Convergence of the SEM and FIB at short working distance allows precision milling, etching and deposition at high resolution.
Features
30 kV Sidewinder Ga+ ion column, 1.5 pA to 20 nA, 1 kV to 30 kV
30 kV Sirion electron column, 500 V to 30 kV
Secondary electron, limited backscattered electron, and secondary ion imaging
Gas injection systems: platinum, tungsten, TEOS, carbon
Micromanipulator from Omniprobe: Autoprobe 200
Raith Elphy lithography system set up for ion-beam lithography
The instrument is located in the CNM clean room.
User Proposal Feasibility
When requesting the use of this instrument, please provide the following information in your user proposal:
Sample materials, shapes, and sizes
Information about the intended patterns (shapes, sizes, distances, area coverage)
Important pattern quality requirements (if any)
Number of samples to process or number of times of instrument usage
Questions? Please contact the instrument custodian before submitting your proposal.
