|
|
| (13 intermediate revisions by the same user not shown) |
| Line 1: |
Line 1: |
| :Microchem :[http://www.microchem.com/ Microchem] is the supplier of our Shipley 1800's, MicroResist Technology, SU8, LOR, SPR, and PMMA photoresists, developers, and strippers.
| | == CNM Cleanroom == |
|
| |
|
| :ZEON :[http://www.zeon.co.jp/index_e.html ZEON] is the supplier of our ZEP photoresists
| | * [[Nanofabrication/Equipment | Nanofabrication Equipment Descriptions]] |
| | |
| | |
| | |
| {| class="wikitable sortable" style="margin: 1em 1em 1em 1em" cellpadding=5px
| |
| |- style="background:lightgrey" align=center
| |
| ! Resist Name !! Photoresist Type !! PR Thickness!! Developer!! Strippers!! SUSS MA6 !! Laser Writer!! Raith!!JEOL!! Process Data Sheet
| |
| |-
| |
| | 1805
| |
| | positive || 400 - 600 nm|| 351 Dev: H20 (1:4) ratios can vary || Acetone/IPA or 1165 || yes|| yes|| || || [[media:somename.pdf|1800]]
| |
| |-
| |
| | 1813
| |
| | positive || 1300 - 1800 nm|| 351 Dev: H20 (1:4) ratios can vary || Acetone/IPA or 1165 || yes|| yes|| || || [[media:somename.pdf|1800]]
| |
| |-
| |
| | 1818
| |
| | positive|| 1700 - 2600 nm|| 351 Dev: H20 (1:4) ratios can vary || Acetone/IPA or 1165 || yes|| yes|| || || [[media:somename.pdf|1800]]
| |
| |-
| |
| | PMMA
| |
| | positive|| || || Acetone/IPA or 1165 || || || |yes||yes|| [[media:pmma.pdf|PMMA]]
| |
| |}
| |