Patterning: Difference between revisions

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LaserWriter.jpg|Laser Pattern Generator LW405
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;[[Nanofabrication/Patterning/MA6]]
Patterning is where you take a design and transfer it onto a substrate. Transferring the pattern can be done by multiple methods.
;[[Nanofabrication/Patterning/Laser Pattern Generator LW405]]
Typically you spin photoresist on a substrate, expose the pattern (using electrons or light in the optical range). Once the sample is exposed it is developed.
;[[Nanofabrication/Patterning/MLA150]]
;[[Photoresist]]
;[[Nanofabrication/Patterning/JEOL8100]]
;[[Spinners]]
;[[Nanofabrication/Patterning/Raith]]
;[[Ovens]]
;[[Hotplate]]
;[[MA6 : Contact Lithography]]
;[[Laser Pattern Generator LW405]]
;[[MLA150]]
;[[JEOL8100]]
;[[Raith]]

Latest revision as of 19:11, June 3, 2021

Patterning

Patterning is where you take a design and transfer it onto a substrate. Transferring the pattern can be done by multiple methods. Typically you spin photoresist on a substrate, expose the pattern (using electrons or light in the optical range). Once the sample is exposed it is developed.

Photoresist
Spinners
Ovens
Hotplate
MA6 : Contact Lithography
Laser Pattern Generator LW405
MLA150
JEOL8100
Raith