Nanofabrication/Photoresist: Difference between revisions

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:Microchem :[http://www.microchem.com/ Microchem] is the supplier of our Shipley 1800's, MicroResist Technology, SU8, LOR, SPR, and PMMA photoresists, developers, and strippers.
:Kayakuam :[https://kayakuam.com/wp-content/uploads/2019/09/S1800-G2.pdf] is the supplier of our Shipley 1800's, MicroResist Technology, SU8, LOR, SPR, and PMMA photoresists, developers, and strippers.


:ZEON :[http://www.zeon.co.jp/index_e.html ZEON] is the supplier of our ZEP photoresists
:ZEON :[http://www.zeon.co.jp/index_e.html ZEON] is the supplier of our ZEP photoresists
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! Resist Name !! Photoresist Type !! PR Thickness!! Developer!! Strippers!! Optical (MA6, Stepper) !! Laser Writer!! EBEAM Lith. (JEOL, RAITH)!! Process Data Sheet
! Resist Name !! Photoresist Type !! PR Thickness!! Developer!! Strippers!! Optical (MA6, Stepper) !! Laser Writer!! EBEAM Lith. (JEOL, RAITH)!! Process Data Sheet
|-
|-
| 1805
| 1800 Series
| positive || 400 - 600 nm|| 351 Dev: H20 (1:4) ratios can vary || Acetone/IPA  or  1165  ||  yes|| yes|| ||  
| positive || 1805, 1813, 1818|| 351 Dev: H20 (1:4) ratios can vary || Acetone/IPA  or  1165  ||  yes|| yes|| ||  
|-
|-



Revision as of 18:51, November 24, 2020


Kayakuam :[1] is the supplier of our Shipley 1800's, MicroResist Technology, SU8, LOR, SPR, and PMMA photoresists, developers, and strippers.
ZEON :ZEON is the supplier of our ZEP photoresists


Resist Name Photoresist Type PR Thickness Developer Strippers Optical (MA6, Stepper) Laser Writer EBEAM Lith. (JEOL, RAITH) Process Data Sheet
1800 Series positive 1805, 1813, 1818 351 Dev: H20 (1:4) ratios can vary Acetone/IPA or 1165 yes yes
1811 positive 1100-1700 nm 351 Dev: H20 (1:4) ratios can vary Acetone/IPA or 1165 yes yes
1813 positive 1300 - 1800 nm 351 Dev: H20 (1:4) ratios can vary Acetone/IPA or 1165 yes yes
1818 positive 1700 - 2600 nm 351 Dev: H20 (1:4) ratios can vary Acetone/IPA or 1165 yes yes
1827 positive 2700- nm 351 Dev: H20 (1:4) ratios can vary Acetone/IPA or 1165 yes yes
AZ P4620 positive 1700 - 2600 nm 351 Dev: H20 (1:4) ratios can vary Acetone/IPA or 1165 yes yes
SPR 220 - 3 positive nm CD26 Acetone/IPA or 1165 yes yes
SPR 220 - 7 positive nm CD26 Acetone/IPA or 1165 yes yes
SPR 955 positive nm CD26 Acetone/IPA or 1165 yes yes
LOR 3A, 30B positive nm CD26 Acetone/IPA or 1165 yes yes
AZ nLOF 2000 negative 351 Dev: H20 (1:3) ratios can vary Acetone/IPA or 1165 yes
ma-N 1400 negative Ma-D 355 Acetone/IPA or 1165 yes
SU8 negative SU8 Developer Acetone/IPA or 1165 yes yes (MLA) yes
SU8 3000 negative SU8 Developer Acetone/IPA or 1165 yes yes (MLA) yes
ZEP positive MIBK: IPA 1:3 Acetone/IPA or 1165 yes
PMMA 495 - A2, A3 positive A2, A3 MIBK: IPA 1:3 Acetone/IPA or 1165 yes
PMMA 950 - A2, A3, A4, A8, A11 positive MIBK: IPA 1:3 Acetone/IPA or 1165 yes