Nanofabrication/Photoresist: Difference between revisions
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! Resist Name !! Photoresist Type !! | ! Resist Name !! Photoresist Type !! Tk/Flavor!! Developer!! Strippers!! Optical (MA6, Stepper) !! Laser Writer!! EBEAM Lith. (JEOL, RAITH)!! Process Data Sheet | ||
|- | |- | ||
| 1800 Series | | 1800 Series | ||
| positive || 1805, 1813, 1818|| 351 Dev: H20 (1:4) ratios can vary || Acetone/IPA or 1165 || yes|| yes|| || | | positive || 1805, 1813, 1818|| 351 Dev: H20 (1:4) ratios can vary || Acetone/IPA or 1165 || yes|| yes|| || https://kayakuam.com/wp-content/uploads/2019/09/S1800-G2.pdf | ||
|- | |- | ||
|- | |- | ||
|AZ P4620 | |AZ P4620 | ||
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| positive|| || MIBK: IPA 1:3|| Acetone/IPA or 1165 || || || |yes|||| | | positive|| || MIBK: IPA 1:3|| Acetone/IPA or 1165 || || || |yes|||| | ||
|- | |- | ||
| PMMA 495 | | PMMA 495 | ||
| positive||A2, A3||| MIBK: IPA 1:3|| Acetone/IPA or 1165 || || || |yes|||| | | positive||A2, A3||| MIBK: IPA 1:3|| Acetone/IPA or 1165 || || || |yes|||| | ||
|- | |- | ||
| PMMA 950 | | PMMA 950 | ||
| positive||A2, A3, A4, A8, A11|| MIBK: IPA 1:3|| Acetone/IPA or 1165 || || || |yes|||| | |||
|} | |} |
Revision as of 18:56, November 24, 2020
- Kayakuam :[1] is the supplier of our Shipley 1800's, MicroResist Technology, SU8, LOR, SPR, and PMMA photoresists, developers, and strippers.
- ZEON :ZEON is the supplier of our ZEP photoresists
Resist Name | Photoresist Type | Tk/Flavor | Developer | Strippers | Optical (MA6, Stepper) | Laser Writer | EBEAM Lith. (JEOL, RAITH) | Process Data Sheet | |
---|---|---|---|---|---|---|---|---|---|
1800 Series | positive | 1805, 1813, 1818 | 351 Dev: H20 (1:4) ratios can vary | Acetone/IPA or 1165 | yes | yes | https://kayakuam.com/wp-content/uploads/2019/09/S1800-G2.pdf | ||
AZ P4620 | positive | 1700 - 2600 nm | 351 Dev: H20 (1:4) ratios can vary | Acetone/IPA or 1165 | yes | yes | |||
SPR 220 - 3 | positive | nm | CD26 | Acetone/IPA or 1165 | yes | yes | |||
SPR 220 - 7 | positive | nm | CD26 | Acetone/IPA or 1165 | yes | yes | |||
SPR 955 | positive | nm | CD26 | Acetone/IPA or 1165 | yes | yes | |||
LOR 3A, 30B | positive | nm | CD26 | Acetone/IPA or 1165 | yes | yes | |||
AZ nLOF 2000 | negative | 351 Dev: H20 (1:3) ratios can vary | Acetone/IPA or 1165 | yes | |||||
ma-N 1400 | negative | Ma-D 355 | Acetone/IPA or 1165 | yes | |||||
SU8 | negative | SU8 Developer | Acetone/IPA or 1165 | yes | yes (MLA) | yes | |||
SU8 3000 | negative | SU8 Developer | Acetone/IPA or 1165 | yes | yes (MLA) | yes | |||
ZEP | positive | MIBK: IPA 1:3 | Acetone/IPA or 1165 | yes | |||||
PMMA 495 | positive | A2, A3 | MIBK: IPA 1:3 | Acetone/IPA or 1165 | yes | ||||
PMMA 950 | positive | A2, A3, A4, A8, A11 | MIBK: IPA 1:3 | Acetone/IPA or 1165 | yes |