Nanofabrication/Photoresist: Difference between revisions
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! Resist Name !! Photoresist Type !! PR Thickness!! Developer!! Strippers!! Optical !! Laser Writer!! Raith!!JEOL!! Process Data Sheet | ! Resist Name !! Photoresist Type !! PR Thickness!! Developer!! Strippers!! Optical/ (MA6, Stepper) !! Laser Writer!! Raith!!JEOL!! Process Data Sheet | ||
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| 1805 | | 1805 | ||
Revision as of 22:56, November 19, 2020
- Microchem :Microchem is the supplier of our Shipley 1800's, MicroResist Technology, SU8, LOR, SPR, and PMMA photoresists, developers, and strippers.
- ZEON :ZEON is the supplier of our ZEP photoresists
| Resist Name | Photoresist Type | PR Thickness | Developer | Strippers | Optical/ (MA6, Stepper) | Laser Writer | Raith | JEOL | Process Data Sheet |
|---|---|---|---|---|---|---|---|---|---|
| 1805 | positive | 400 - 600 nm | 351 Dev: H20 (1:4) ratios can vary | Acetone/IPA or 1165 | yes | yes | 1800 | ||
| 1811 | positive | 400 - 600 nm | 351 Dev: H20 (1:4) ratios can vary | Acetone/IPA or 1165 | yes | yes | 1800 | ||
| 1813 | positive | 1300 - 1800 nm | 351 Dev: H20 (1:4) ratios can vary | Acetone/IPA or 1165 | yes | yes | 1800 | ||
| 1818 | positive | 1700 - 2600 nm | 351 Dev: H20 (1:4) ratios can vary | Acetone/IPA or 1165 | yes | yes | 1800 | ||
| 1827 | positive | 1700 - 2600 nm | 351 Dev: H20 (1:4) ratios can vary | Acetone/IPA or 1165 | yes | yes | 1800 | ||
| AZ P4620 | positive | 1700 - 2600 nm | 351 Dev: H20 (1:4) ratios can vary | Acetone/IPA or 1165 | yes | yes | 1800 | ||
| SPR 220 - 3 | positive | nm | CD26 | Acetone/IPA or 1165 | yes | yes | 1800 | ||
| PMMA | positive | Acetone/IPA or 1165 | yes | yes | PMMA |