Nanofabrication/Photoresist: Difference between revisions

Revision as of 22:55, November 19, 2020

Microchem :Microchem is the supplier of our Shipley 1800's, MicroResist Technology, SU8, LOR, SPR, and PMMA photoresists, developers, and strippers.

ZEON :ZEON is the supplier of our ZEP photoresists

Resist Name	Photoresist Type	PR Thickness	Developer	Strippers	Optical	Laser Writer	Raith	JEOL	Process Data Sheet
1805	positive	400 - 600 nm	351 Dev: H20 (1:4) ratios can vary	Acetone/IPA or 1165	yes	yes			1800
1811	positive	400 - 600 nm	351 Dev: H20 (1:4) ratios can vary	Acetone/IPA or 1165	yes	yes			1800
1813	positive	1300 - 1800 nm	351 Dev: H20 (1:4) ratios can vary	Acetone/IPA or 1165	yes	yes			1800
1818	positive	1700 - 2600 nm	351 Dev: H20 (1:4) ratios can vary	Acetone/IPA or 1165	yes	yes			1800
1827	positive	1700 - 2600 nm	351 Dev: H20 (1:4) ratios can vary	Acetone/IPA or 1165	yes	yes			1800
AZ P4620	positive	1700 - 2600 nm	351 Dev: H20 (1:4) ratios can vary	Acetone/IPA or 1165	yes	yes			1800
SPR 220 - 3	positive	nm	CD26	Acetone/IPA or 1165	yes	yes			1800
PMMA	positive			Acetone/IPA or 1165			yes	yes	PMMA

@@ Line 10: / Line 10: @@
 {| class="wikitable sortable" style="margin: 1em 1em 1em 1em"   cellpadding=5px
 |- style="background:lightgrey" align=center
-! Resist Name !! Photoresist Type !! PR Thickness!! Developer!! Strippers!! SUSS MA6 !! Laser Writer!! Raith!!JEOL!! Process Data Sheet
+! Resist Name !! Photoresist Type !! PR Thickness!! Developer!! Strippers!! Optical !! Laser Writer!! Raith!!JEOL!! Process Data Sheet
 |-
 | 1805
@@ Line 30: / Line 30: @@
 |AZ P4620
 | positive|| 1700 - 2600 nm|| 351 Dev: H20 (1:4) ratios can vary || Acetone/IPA   or   1165   ||  yes|| yes|| || ||  [[media:somename.pdf|1800]]
+|-
+|SPR 220 - 3
+| positive||nm||CD26 || Acetone/IPA   or   1165   ||  yes|| yes|| || ||  [[media:somename.pdf|1800]]
 |-
 | PMMA
 | positive|| || || Acetone/IPA   or   1165   || || || |yes||yes||  [[media:pmma.pdf|PMMA]]
 |}