Nanofabrication/Photoresist: Difference between revisions
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|AZ nLOF 2000 | |AZ nLOF 2000 | ||
| negative|| || 351 Dev: H20 (1:3) ratios can vary|| Acetone/IPA or 1165 || || || |yes|||| | | negative|| || 351 Dev: H20 (1:3) ratios can vary|| Acetone/IPA or 1165 || || || |yes|||| | ||
|- | |||
|ma-N 1400 | |||
| negative|| || Ma-D 355|| Acetone/IPA or 1165 || || || |yes|||| | |||
|- | |- | ||
| SU8 | | SU8 | ||
| Line 56: | Line 59: | ||
|- | |- | ||
| PMMA 495 - A2, A3 | | PMMA 495 - A2, A3 | ||
| positive|| || MIBK: IPA 1:3|| Acetone/IPA or 1165 || || || |yes|||| | | positive||A2, A3||| MIBK: IPA 1:3|| Acetone/IPA or 1165 || || || |yes|||| | ||
|- | |- | ||
| PMMA 950 - A2, A3, A4, A8, A11 | | PMMA 950 - A2, A3, A4, A8, A11 | ||
| positive|| || MIBK: IPA 1:3|| Acetone/IPA or 1165 || || || |yes|||| | | positive|| || MIBK: IPA 1:3|| Acetone/IPA or 1165 || || || |yes|||| | ||
|} | |} | ||
Revision as of 18:21, November 20, 2020
- Microchem :Microchem is the supplier of our Shipley 1800's, MicroResist Technology, SU8, LOR, SPR, and PMMA photoresists, developers, and strippers.
- ZEON :ZEON is the supplier of our ZEP photoresists
| Resist Name | Photoresist Type | PR Thickness | Developer | Strippers | Optical (MA6, Stepper) | Laser Writer | EBEAM Lith. (JEOL, RAITH) | Process Data Sheet | |
|---|---|---|---|---|---|---|---|---|---|
| 1805 | positive | 400 - 600 nm | 351 Dev: H20 (1:4) ratios can vary | Acetone/IPA or 1165 | yes | yes | |||
| 1811 | positive | 400 - 600 nm | 351 Dev: H20 (1:4) ratios can vary | Acetone/IPA or 1165 | yes | yes | |||
| 1813 | positive | 1300 - 1800 nm | 351 Dev: H20 (1:4) ratios can vary | Acetone/IPA or 1165 | yes | yes | |||
| 1818 | positive | 1700 - 2600 nm | 351 Dev: H20 (1:4) ratios can vary | Acetone/IPA or 1165 | yes | yes | |||
| 1827 | positive | 1700 - 2600 nm | 351 Dev: H20 (1:4) ratios can vary | Acetone/IPA or 1165 | yes | yes | |||
| AZ P4620 | positive | 1700 - 2600 nm | 351 Dev: H20 (1:4) ratios can vary | Acetone/IPA or 1165 | yes | yes | |||
| SPR 220 - 3 | positive | nm | CD26 | Acetone/IPA or 1165 | yes | yes | |||
| SPR 220 - 7 | positive | nm | CD26 | Acetone/IPA or 1165 | yes | yes | |||
| SPR 955 | positive | nm | CD26 | Acetone/IPA or 1165 | yes | yes | |||
| LOR 3A, 30B | positive | nm | CD26 | Acetone/IPA or 1165 | yes | yes | |||
| AZ nLOF 2000 | negative | 351 Dev: H20 (1:3) ratios can vary | Acetone/IPA or 1165 | yes | |||||
| ma-N 1400 | negative | Ma-D 355 | Acetone/IPA or 1165 | yes | |||||
| SU8 | negative | SU8 Developer | Acetone/IPA or 1165 | yes | yes (MLA) | yes | |||
| SU8 3000 | negative | SU8 Developer | Acetone/IPA or 1165 | yes | yes (MLA) | yes | |||
| ZEP | positive | MIBK: IPA 1:3 | Acetone/IPA or 1165 | yes | |||||
| PMMA 495 - A2, A3 | positive | A2, A3 | MIBK: IPA 1:3 | Acetone/IPA or 1165 | yes | ||||
| PMMA 950 - A2, A3, A4, A8, A11 | positive | MIBK: IPA 1:3 | Acetone/IPA or 1165 | yes |