Patterning: Difference between revisions
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Patterning is where you take a design and transfer it onto a substrate. Transferring the pattern can be done by multiple methods. | |||
Typically you spin photoresist on a substrate, expose the pattern (using electrons or light in the optical range). Once the sample is exposed it is developed. | |||
;[[Photoresist]] | ;[[Photoresist]] | ||
;[[Spinners]] | ;[[Spinners]] | ||
;[[Ovens]] | ;[[Ovens]] | ||
;[[Hotplate]] | ;[[Hotplate]] | ||
;[[MA6]] | ;[[MA6 : Contact Lithography]] | ||
;[[Laser Pattern Generator LW405]] | ;[[Laser Pattern Generator LW405]] | ||
;[[MLA150]] | ;[[MLA150]] | ||
;[[JEOL8100]] | ;[[JEOL8100]] | ||
;[[Raith]] | ;[[Raith]] | ||
Latest revision as of 19:11, June 3, 2021
Patterning
Patterning is where you take a design and transfer it onto a substrate. Transferring the pattern can be done by multiple methods. Typically you spin photoresist on a substrate, expose the pattern (using electrons or light in the optical range). Once the sample is exposed it is developed.