Patterning: Difference between revisions
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;[[MA6]] | Patterning is where you take a design and transfer it onto a substrate. Transferring the pattern can be done by multiple methods. | ||
;[[ | Typically you spin photoresist on a substrate, expose the pattern (using electrons or light in the optical range). Once the sample is exposed it is developed. | ||
;[[ | ;[[Photoresist]] | ||
;[[ | ;[[Spinners]] | ||
;[[ | ;[[Ovens]] | ||
;[[Hotplate]] | |||
;[[MA6 : Contact Lithography]] | |||
;[[Laser Pattern Generator LW405]] | |||
;[[MLA150]] | |||
;[[JEOL8100]] | |||
;[[Raith]] | |||
Latest revision as of 19:11, June 3, 2021
Patterning
Patterning is where you take a design and transfer it onto a substrate. Transferring the pattern can be done by multiple methods. Typically you spin photoresist on a substrate, expose the pattern (using electrons or light in the optical range). Once the sample is exposed it is developed.