Nanofabrication/Photoresist: Difference between revisions

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:Microchem :[http://www.microchem.com/ Microchem] is the supplier of our Shipley 1800's, MicroResist Technology, SU8, LOR, SPR, and PMMA photoresists, developers, and strippers.
:Kayakuam :[https://kayakuam.com/wp-content/uploads/2019/09/S1800-G2.pdf] is the supplier of our Shipley 1800's, MicroResist Technology, SU8, LOR, SPR, and PMMA photoresists, developers, and strippers.


:ZEON :[http://www.zeon.co.jp/index_e.html ZEON] is the supplier of our ZEP photoresists
:ZEON :[http://www.zeon.co.jp/index_e.html ZEON] is the supplier of our ZEP photoresists
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{| class="wikitable sortable" style="margin: 1em 1em 1em 1em"  cellpadding=5px
{| class="wikitable sortable" style="margin: 1em 1em 1em 1em"  cellpadding=5px
|- style="background:lightgrey" align=center
|- style="background:lightgrey" align=center
! Resist Name !! Photoresist Type !! PR Thickness!! Developer!! Strippers!! Optica (MA6, Stepper) !! Laser Writer!! EBEAM Lith. (JEOL, RAITH)!! Process Data Sheet
! Resist Name !! Photoresist Type !! Tk/Flavor!! Developer!! Strippers!! Optical (MA6, Stepper) !! Laser Writer!! EBEAM Lith. (JEOL, RAITH)!! Process Data Sheet
|-
|-
| 1805
| 1800 Series
| positive || 400 - 600 nm|| 351 Dev: H20 (1:4) ratios can vary || Acetone/IPA  or  1165  ||  yes|| yes|| ||  
| positive || 1805, 1813, 1818|| 351 Dev: H20 (1:4) ratios can vary || Acetone/IPA  or  1165  ||  yes|| yes|| || https://kayakuam.com/wp-content/uploads/2019/09/S1800-G2.pdf
|-
|-


| 1811
 
| positive || 400 - 600 nm|| 351 Dev: H20 (1:4) ratios can vary || Acetone/IPA  or  1165  ||  yes|| yes|| ||  
   
|-
|-
| 1813
|AZ P4620
| positive || 1300 - 1800 nm|| 351 Dev: H20 (1:4) ratios can vary || Acetone/IPA  or  1165  ||  yes|| yes||||
| positive|| 1700 - 2600 nm|| 351 Dev: H20 (1:4) ratios can vary || Acetone/IPA  or  1165  ||  yes|| yes|| ||  
|-
|-
| 1818
|SPR 220 series
| positive|| 1700 - 2600 nm|| 351 Dev: H20 (1:4) ratios can vary || Acetone/IPA  or  1165  ||  yes|| yes|| ||
| positive||3, 7 i-line photoresist||CD26 || Acetone/IPA  or  1165  ||  yes|| yes|| || https://kayakuam.com/wp-content/uploads/2019/10/SPR_220_DATA_SHEET_RH.pdf
|-
|-
| 1827
 
| positive|| 1700 - 2600 nm|| 351 Dev: H20 (1:4) ratios can vary || Acetone/IPA  or  1165  ||  yes|| yes|| || 
|-
|AZ P4620
| positive|| 1700 - 2600 nm|| 351 Dev: H20 (1:4) ratios can vary || Acetone/IPA  or  1165  ||  yes|| yes|| ||
|-
|-
|SPR 220 - 3
|SPR 955-CM Series
| positive||nm||CD26 || Acetone/IPA  or  1165  ||  yes|| yes|| ||  
| positive||nm||CD26 || Acetone/IPA  or  1165  ||  yes|| yes(MLA)|| || https://kayakuam.com/products/megaposit-spr955-cm-series-high-resolution-i-line-photoresists/
|-
|-
|SPR 220 - 7
|LOR 3A, 30B
| positive||nm||CD26 || Acetone/IPA  or  1165  ||  yes|| yes|| ||  
| positive||nm||CD26 || Acetone/IPA  or  1165  ||  yes|| yes|| || https://kayakuam.com/wp-content/uploads/2019/09/KAM-LOR-PMGI-Data-Sheet-11719.pdf
|-
|-
|SPR 955
|AZ nLOF 2000
| positive||nm||CD26 || Acetone/IPA  or  1165  || yes|| yes|| ||  
| negative|| || 351 Dev: H20 (1:3) ratios can vary|| Acetone/IPA  or  1165  || || || |yes||||
|-
|-
| PMMA
|ma-N 1400 Series
| positive|| || MIBK: IPA 1:3|| Acetone/IPA  or  1165  || || || |yes||||   
| negative|| || Ma-D 355|| Acetone/IPA  or  1165  || || || |yes|||https://kayakuam.com/wp-content/uploads/2019/09/ma-N-1400-400-overview.pdf|   
|-
|-
| SU8
| SU8
| negative|| || SU8 Developer|| Acetone/IPA  or  1165  || yes|| |yes (MLA) ||yes||||   
| negative|| || SU8 Developer|| Acetone/IPA  or  1165  || yes|| |yes (MLA) ||yes|||https://kayakuam.com/wp-content/uploads/2020/09/KAM-SU-8-2-25-Datasheet-9.3.20-final.pdf|   
|-
|-
| SU8 3000
| SU8 3000
| negative|| || SU8 Developer|| Acetone/IPA  or  1165  || |yes|| |yes (MLA) ||yes||||   
| negative|| || SU8 Developer|| Acetone/IPA  or  1165  || |yes|| |yes (MLA) ||yes||||   
|-
|-
| PMMA
|ZEP
| positive|| || MIBK: IPA 1:3|| Acetone/IPA  or  1165  || || || |yes||||   
| positive|| || MIBK: IPA 1:3|| Acetone/IPA  or  1165  || || || |yes||||   
|-
| PMMA 495
| positive||A2, A3||| MIBK: IPA 1:3|| Acetone/IPA  or  1165  || || || |yes|||https://kayakuam.com/wp-content/uploads/2019/09/PMMA_Data_Sheet.pdf|
|-
| PMMA 950
| positive||A2, A3, A4, A8, A11|| MIBK: IPA 1:3|| Acetone/IPA  or  1165  || || || |yes|||https://kayakuam.com/wp-content/uploads/2019/09/PMMA_Data_Sheet.pdf|
|}
|}

Latest revision as of 19:12, November 24, 2020


Kayakuam :[1] is the supplier of our Shipley 1800's, MicroResist Technology, SU8, LOR, SPR, and PMMA photoresists, developers, and strippers.
ZEON :ZEON is the supplier of our ZEP photoresists


Resist Name Photoresist Type Tk/Flavor Developer Strippers Optical (MA6, Stepper) Laser Writer EBEAM Lith. (JEOL, RAITH) Process Data Sheet
1800 Series positive 1805, 1813, 1818 351 Dev: H20 (1:4) ratios can vary Acetone/IPA or 1165 yes yes https://kayakuam.com/wp-content/uploads/2019/09/S1800-G2.pdf
AZ P4620 positive 1700 - 2600 nm 351 Dev: H20 (1:4) ratios can vary Acetone/IPA or 1165 yes yes
SPR 220 series positive 3, 7 i-line photoresist CD26 Acetone/IPA or 1165 yes yes https://kayakuam.com/wp-content/uploads/2019/10/SPR_220_DATA_SHEET_RH.pdf
SPR 955-CM Series positive nm CD26 Acetone/IPA or 1165 yes yes(MLA) https://kayakuam.com/products/megaposit-spr955-cm-series-high-resolution-i-line-photoresists/
LOR 3A, 30B positive nm CD26 Acetone/IPA or 1165 yes yes https://kayakuam.com/wp-content/uploads/2019/09/KAM-LOR-PMGI-Data-Sheet-11719.pdf
AZ nLOF 2000 negative 351 Dev: H20 (1:3) ratios can vary Acetone/IPA or 1165 yes
ma-N 1400 Series negative Ma-D 355 Acetone/IPA or 1165 yes https://kayakuam.com/wp-content/uploads/2019/09/ma-N-1400-400-overview.pdf%7C
SU8 negative SU8 Developer Acetone/IPA or 1165 yes yes (MLA) yes https://kayakuam.com/wp-content/uploads/2020/09/KAM-SU-8-2-25-Datasheet-9.3.20-final.pdf%7C
SU8 3000 negative SU8 Developer Acetone/IPA or 1165 yes yes (MLA) yes
ZEP positive MIBK: IPA 1:3 Acetone/IPA or 1165 yes
PMMA 495 positive A2, A3 MIBK: IPA 1:3 Acetone/IPA or 1165 yes https://kayakuam.com/wp-content/uploads/2019/09/PMMA_Data_Sheet.pdf%7C
PMMA 950 positive A2, A3, A4, A8, A11 MIBK: IPA 1:3 Acetone/IPA or 1165 yes https://kayakuam.com/wp-content/uploads/2019/09/PMMA_Data_Sheet.pdf%7C
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