Nanoprobe Scanning Quick Reference

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Chamber overview

<gallery mode="packed-hover">

Chamber layout.png
Chamber interior.png
Scanning sketch.png

The Nanoprobe Instrument (NPI) consists of a Focusing Optics Module which holds a Fresnel zone plate that is integrated with a central beam stop. This optic focuses through a differentially adjustable Order Sorting Aperture (OSA) so that the primary unfocused beam is blocked either by the central sotp or the OSA - this OSA stage is also mounted on the FOM allowing the combination to be moved simultaneously. The combination of these two elements focuses the beam onto the Sample Module that provides translational and rotational control of the sample position. Laser interferometry is used to track the X/Y position of both the optic and sample stages relative to a common reference frame, allowing the user to scan the fine position of the optic differentially locked in to the sample position which continuously corrects uncontrolled positional drift over the scan.

Coarse scanning

Coarse scanning.png
Coarse scanning sketch.png

Image for coarse scanning here

Fine scanning

Image for fine scanning here

Fine scanning.png
Fine scanning sketch.png

Focusing

Image for focusing here

Focusing sketch.png

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