Nanofabrication

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Revision as of 18:53, November 18, 2020 by Csmiller (talk | contribs) (Created page with ":Microchem :[http://www.microchem.com/ Microchem] is the supplier of our Shipley 1800's, MicroResist Technology, SU8, LOR, SPR, and PMMA photoresists, developers, and stripper...")
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Microchem :Microchem is the supplier of our Shipley 1800's, MicroResist Technology, SU8, LOR, SPR, and PMMA photoresists, developers, and strippers.
ZEON :ZEON is the supplier of our ZEP photoresists


Resist Name Photoresist Type PR Thickness Developer Strippers SUSS MA6 Laser Writer Raith JEOL Process Data Sheet
1805 positive 400 - 600 nm 351 Dev: H20 (1:4) ratios can vary Acetone/IPA or 1165 yes yes 1800
1813 positive 1300 - 1800 nm 351 Dev: H20 (1:4) ratios can vary Acetone/IPA or 1165 yes yes 1800
1818 positive 1700 - 2600 nm 351 Dev: H20 (1:4) ratios can vary Acetone/IPA or 1165 yes yes 1800
PMMA positive Acetone/IPA or 1165 yes yes PMMA