Nanofabrication: Difference between revisions

Latest revision as of 19:35, June 3, 2021

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-:Microchem :[http://www.microchem.com/ Microchem] is the supplier of our Shipley 1800's, MicroResist Technology, SU8, LOR, SPR, and PMMA photoresists, developers, and strippers.
+== CNM Cleanroom ==
-:ZEON :[http://www.zeon.co.jp/index_e.html ZEON] is the supplier of our ZEP photoresists
+* [[Nanofabrication/Equipment | Nanofabrication Equipment Descriptions]]
-{| class="wikitable sortable" style="margin: 1em 1em 1em 1em"  cellpadding=5px
-|- style="background:lightgrey" align=center
-! Resist Name !! Photoresist Type !! PR Thickness!! Developer!! Strippers!! SUSS MA6 !! Laser Writer!! Raith!!JEOL!! Process Data Sheet
-|-
-| 1805
-| positive || 400 - 600 nm|| 351 Dev: H20 (1:4) ratios can vary || Acetone/IPA  or  1165  ||  yes|| yes|| || ||  [[media:somename.pdf|1800]]
-|-
-| 1813
-| positive || 1300 - 1800 nm|| 351 Dev: H20 (1:4) ratios can vary || Acetone/IPA  or  1165  ||  yes|| yes|| || ||  [[media:somename.pdf|1800]]
-|-
-| 1818
-| positive|| 1700 - 2600 nm|| 351 Dev: H20 (1:4) ratios can vary || Acetone/IPA  or  1165  ||  yes|| yes|| || ||  [[media:somename.pdf|1800]]
-|-
-| PMMA
-| positive|| || || Acetone/IPA  or  1165  || || || |yes||yes||  [[media:pmma.pdf|PMMA]]
-|}