Nanofabrication: Difference between revisions

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(Created page with ":Microchem :[http://www.microchem.com/ Microchem] is the supplier of our Shipley 1800's, MicroResist Technology, SU8, LOR, SPR, and PMMA photoresists, developers, and stripper...")
 
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:Microchem :[http://www.microchem.com/ Microchem] is the supplier of our Shipley 1800's, MicroResist Technology, SU8, LOR, SPR, and PMMA photoresists, developers, and strippers.
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:ZEON :[http://www.zeon.co.jp/index_e.html ZEON] is the supplier of our ZEP photoresists


* [[Nanofabrication/Equipment | Nanofabrication Equipment Descriptions]]
* [[Nanofabrication/Photoresist | Nanofabrication Photoresist Information]]
* [[Nanofabrication/ Vendor and Spares Information | Nanofabrication Equipment Vendor and Spares Information]]
* [[Nanofabrication/Masks | Mask Design and Photomask  Information]]
* [[Nanofabrication/Processes | Nanofabrication Process Information]]




{| class="wikitable sortable" style="margin: 1em 1em 1em 1em"  cellpadding=5px
* [[Nanofabrication/ archive | archive]]
|- style="background:lightgrey" align=center
 
! Resist Name !! Photoresist Type !! PR Thickness!! Developer!! Strippers!! SUSS MA6 !! Laser Writer!! Raith!!JEOL!! Process Data Sheet
{{Standard Footer}}
|-
| 1805
| positive || 400 - 600 nm|| 351 Dev: H20 (1:4) ratios can vary || Acetone/IPA  or  1165  ||  yes|| yes|| || ||  [[media:somename.pdf|1800]]
|-
| 1813
| positive || 1300 - 1800 nm|| 351 Dev: H20 (1:4) ratios can vary || Acetone/IPA  or  1165  ||  yes|| yes|| || || [[media:somename.pdf|1800]]
|-
| 1818
| positive|| 1700 - 2600 nm|| 351 Dev: H20 (1:4) ratios can vary || Acetone/IPA  or  1165  ||  yes|| yes|| || ||  [[media:somename.pdf|1800]]
|-
| PMMA
| positive|| || || Acetone/IPA  or  1165  || || || |yes||yes||  [[media:pmma.pdf|PMMA]]
|}

Revision as of 20:27, November 18, 2020

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