https://wiki.anl.gov/wiki_cnm/index.php?action=history&feed=atom&title=Photoresist 2026-06-03T23:02:31Z Revision history for this page on the wiki MediaWiki 1.43.8 https://wiki.anl.gov/wiki_cnm/index.php?title=Photoresist&diff=6926&oldid=prev 2021-06-02T20:32:07Z

<p>Created page with &quot; :Kayakuam :[https://kayakuam.com/wp-content/uploads/2019/09/S1800-G2.pdf] is the supplier of our Shipley 1800&#039;s, MicroResist Technology, SU8, LOR, SPR, and PMMA photoresists,...&quot;</p> <p><b>New page</b></p><div><br /> :Kayakuam :[https://kayakuam.com/wp-content/uploads/2019/09/S1800-G2.pdf] is the supplier of our Shipley 1800&#039;s, MicroResist Technology, SU8, LOR, SPR, and PMMA photoresists, developers, and strippers.<br /> <br /> :ZEON :[http://www.zeon.co.jp/index_e.html ZEON] is the supplier of our ZEP photoresists<br /> <br /> <br /> <br /> {| class=&quot;wikitable sortable&quot; style=&quot;margin: 1em 1em 1em 1em&quot; cellpadding=5px<br /> |- style=&quot;background:lightgrey&quot; align=center<br /> ! Resist Name !! Photoresist Type !! Tk/Flavor!! Developer!! Strippers!! Optical (MA6, Stepper) !! Laser Writer!! EBEAM Lith. (JEOL, RAITH)!! Process Data Sheet<br /> |-<br /> | 1800 Series<br /> | positive || 1805, 1813, 1818|| 351 Dev: H20 (1:4) ratios can vary || Acetone/IPA or 1165 || yes|| yes|| || https://kayakuam.com/wp-content/uploads/2019/09/S1800-G2.pdf<br /> |-<br /> <br /> <br /> <br /> |-<br /> |AZ P4620<br /> | positive|| 1700 - 2600 nm|| 351 Dev: H20 (1:4) ratios can vary || Acetone/IPA or 1165 || yes|| yes|| || <br /> |-<br /> |SPR 220 series<br /> | positive||3, 7 i-line photoresist||CD26 || Acetone/IPA or 1165 || yes|| yes|| || https://kayakuam.com/wp-content/uploads/2019/10/SPR_220_DATA_SHEET_RH.pdf<br /> |-<br /> <br /> |-<br /> |SPR 955-CM Series<br /> | positive||nm||CD26 || Acetone/IPA or 1165 || yes|| yes(MLA)|| || https://kayakuam.com/products/megaposit-spr955-cm-series-high-resolution-i-line-photoresists/<br /> |-<br /> |LOR 3A, 30B<br /> | positive||nm||CD26 || Acetone/IPA or 1165 || yes|| yes|| || https://kayakuam.com/wp-content/uploads/2019/09/KAM-LOR-PMGI-Data-Sheet-11719.pdf<br /> |-<br /> |AZ nLOF 2000 <br /> | negative|| || 351 Dev: H20 (1:3) ratios can vary|| Acetone/IPA or 1165 || || || |yes|||| <br /> |-<br /> |ma-N 1400 Series<br /> | negative|| || Ma-D 355|| Acetone/IPA or 1165 || || || |yes|||https://kayakuam.com/wp-content/uploads/2019/09/ma-N-1400-400-overview.pdf| <br /> |-<br /> | SU8<br /> | negative|| || SU8 Developer|| Acetone/IPA or 1165 || yes|| |yes (MLA) ||yes|||https://kayakuam.com/wp-content/uploads/2020/09/KAM-SU-8-2-25-Datasheet-9.3.20-final.pdf| <br /> |-<br /> | SU8 3000<br /> | negative|| || SU8 Developer|| Acetone/IPA or 1165 || |yes|| |yes (MLA) ||yes|||| <br /> |-<br /> |ZEP<br /> | positive|| || MIBK: IPA 1:3|| Acetone/IPA or 1165 || || || |yes|||| <br /> |-<br /> | PMMA 495<br /> | positive||A2, A3||| MIBK: IPA 1:3|| Acetone/IPA or 1165 || || || |yes|||https://kayakuam.com/wp-content/uploads/2019/09/PMMA_Data_Sheet.pdf| <br /> |-<br /> | PMMA 950 <br /> | positive||A2, A3, A4, A8, A11|| MIBK: IPA 1:3|| Acetone/IPA or 1165 || || || |yes|||https://kayakuam.com/wp-content/uploads/2019/09/PMMA_Data_Sheet.pdf| <br /> |}</div>

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